Sputtered Films, Inc. Model CTOC System 56

Test & Measurement

General Lab

Semiconductor Manufacturing

Dual Side Metal Fiber Optic Sputter System
with 8 DC sputtering guns
For Sale by End User. Can be upgraded to handle 4 inch wafer.

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Sputtered Films, Inc. Model CTOC System 56

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Price : $ 55,000

Seller : Used-Line Referral Service

Sales Conditions :
Offered for sale by a Used-Line Verified Dealer. Used-Line has been working with this dealer since 2003. This dealer has exceeded our expectations of Professionalism,Integrity and Expertise.

About the Used-Line Referral Service

Description : Sputtered Films, Inc. Model CTOC System 56 Load lock sputtering system

Single cathode, cassette-to-cassette, load lock sputtering system,

Model CTOC System 56 with Series III S-Gun.

For 4" or 5" diameter wafers.

Very low usage hours. In excellent condition.

System Description: Cassette loading system. Small volume load lock. Small volume process chamber.

One SFI Series III sputter gun with 7" diameter cathode. Balzers/Pfeffer Model TPH 330 Turbo Pump and controller.

SFI computer control system with UPS allows for an automated, recipe driven process.

Advanced Energy MDX 10KW DC sputtering power supply.

HP 6012B DC Power supply, 60V, 50 amp for Series III S-gun anode biasing.

Granville Phillips 275 mini-convectron gauges, along with standard ion gauge tubes are used for vacuum monitoring.

Advanced Energy Model RFX 600, 600 wass RF generator with Advanced Energy ATF 600 automatic impedance matching network with controll.

Leybold Hereaus Model D30 direct drive mechanical pump.

Manuals and documentation.

Extensive spare parts, extra process chamber with misener trap installed, and SFI Series III S-gun.

Seller Info :

Used-Line Referral Service

This item was listed through the Used-Line Referral Service, a commission based service. All equipment listed is for sale by dealers or end-users. Equipment brokers included in this service are identified as Used-Line Verified Equipment Brokers.

Use the RFQ form to inquire about this equipment. We will immediately email to you the contact info of the seller. The seller will also be sent an email with your inquiry.

Be sure to include all your contact and company information. Sellers may not respond to inquiries that do not have a company name address and phone number.

We will send you a follow up email a few weeks after you send your RFQ.

Used-Line does not buy or sell equipment.

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