Sputtered Films, Inc. Model CTOC System 56

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INNOTEC DIODE SPUTTER SYSTEM DS 24
Can be easily adapted to a wide variety of diode sputtering applications. Configured for either sputter up or sputter down.
Click to Inquire. Many Options Available.

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Sputtered Films, Inc. Model CTOC System 56

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Price : $ 55,000

Seller : #245 (ULRS)

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Sales Conditions :
Offered for sale by a Used-Line Verified Dealer. Used-Line has been working with this dealer since 2003. This dealer has exceeded our expectations of Professionalism,Integrity and Expertise.

Description : Sputtered Films, Inc. Model CTOC System 56 Load lock sputtering system

Single cathode, cassette-to-cassette, load lock sputtering system,

Model CTOC System 56 with Series III S-Gun.

For 4" or 5" diameter wafers.

Very low usage hours. In excellent condition.

System Description: Cassette loading system. Small volume load lock. Small volume process chamber.

One SFI Series III sputter gun with 7" diameter cathode. Balzers/Pfeffer Model TPH 330 Turbo Pump and controller.

SFI computer control system with UPS allows for an automated, recipe driven process.

Advanced Energy MDX 10KW DC sputtering power supply.

HP 6012B DC Power supply, 60V, 50 amp for Series III S-gun anode biasing.

Granville Phillips 275 mini-convectron gauges, along with standard ion gauge tubes are used for vacuum monitoring.

Advanced Energy Model RFX 600, 600 wass RF generator with Advanced Energy ATF 600 automatic impedance matching network with controll.

Leybold Hereaus Model D30 direct drive mechanical pump.

Manuals and documentation.

Extensive spare parts, extra process chamber with misener trap installed, and SFI Series III S-gun.

Seller Info :

Used-Line Referral Service (ULRS)

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