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Gasonics Aura 3000 (Allwin21)

   
 
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Gasonics Aura 3000 (Allwin21)



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Price : Call
Equipment Location : USA  
This dealer's latest update: 20 days ago
Seller : Allwin21 Corp
Phone : 001-408-9885188
Fax :     001-408-9047168
More info about seller...
Description : Refurbished Gasonics Aura 3010 for 8 inch plasma asher
Manufacturer:Gasonics
Refurbished Standard GasOnics Aura 3010 Asher System
• No RF damage (?0.1 volt CV shift)
• High throughput
• Front and backside etching
• Excellent etch rates and uniformities
• 150mm – 200mm wafer capability
• 3 gas MFC
• Variable platen temperature
• Alumina (ceramic) plasma tube
• Fluorine compatible chamber
• Well-characterized process
• Multiple step process capability
• High capital productivity.
• Chamber wall heated and temperature controlled to make better repeatability.
 
Seller Info :
Company : Allwin21 Corp
Contact Name :  Peter Chen
Company Info :  Allwin21 is the exclusive manufacture for AG Heatpulse 610 under the licence. Allwin21 is making new AG Heatpulse 610 named of AccuThermo AW 610 machine with its innovative software and more advanced temperature measurement technologies. We can also supply refurbished AG Heatpulse,Gasonics,Tegal,Matrix tools.
Sales Conditions : Ex-work (If FOB or CIF,the buy should pay the delivery cost)
(Semiconductors eq.) (Calibration) (Repair)
Address : 1550 Norman Ave,Santa Clara
Web : View Website
Phone : 001-408-9885188
Fax : 001-408-9047168
 
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