TOKUDA TYLAN, HIRRIE 100, Metal Plasma Etcher
The Hirrie Series Model 100 Aluminum etching system offers cassette to cassette single-wafer processing of wafers from 100 to 150 mm diameter wafers. Click on photo to inquire.
Tegal 701 In Line Automatic Plasma Etcher • Cassette to cassette system • Designed especially to accommodate 100mm wafers;
• Provides up to four process gasses;
• Provides up to two process channels;
more.... click on photo