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Applied Materials 2674

   
 
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Applied Materials 2674



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Price : $195,000
Equipment Location : USA  
This dealer's latest update: 1 days ago
Seller : Equipment for Technology & Science Inc.
Phone : 408/360-0380
Fax :     408/360-0390
More info about seller...
Description : Applied Materials R-2674: P5000Mk2 AMAT 5000 CVD cluster tool configured for 100mm wafers (SMF). Configuration: Position A (VA)PE TEOS standard for oxide-USG, Position B for (JA)PE Silane standard Nitride, Position C Mark II oxide etch. Tool completely refurbished and installed by Applied Materials in November 2000 with all new process kits and Y2K upgrades. Includes expanded VME system controller, Version 4 hot box, Unit MFC s on all chambers, 28 line on-board gas panel, load lock chamber with 8 slot storage elevator, purge, Neslab HX-150 chiller, AMAT-0 heat exchanger, SECS II, Position A has 100mm TEOS/USG chamber with endpoint detector, ENI OEM-12B07 1200w RF supply with match, Ebara A70W dry pump, gold plated lamp module, metal wafer lift, downstream throttle valve, process kit with plate stock susceptor Position B has 100mm standard Silane Nitride chamber with upstream throttle valve, ENI OEM-12B07 1200w Rf supply, Ebara A70W dry pump, integrated endpoint detector, metal wafer lift, process kit and susceptor, DPA Position C is 100mm MK II oxide etch chamber with Leybold 400MCT non heated turbo pump, Ebara A30W Ebara dry pump, ENI OEM-12B07 13.56mhz 1200w supply and match, process kit, aluminum gas distribution kit, integrated endpoint detector. Full manual set included with CD s. 208v, 60hz Inquire for complete specifications.
 
Seller Info :
Company : Equipment for Technology & Science Inc.
Contact Name :  Steven Scher/ Peter Broesamle
Company Info :  Since 1985 ETS has specialized in preowned metrology and optical inspection equipment for the semiconductor, flat panel and memory disk industries as well as equipment for general research and development.
Sales Conditions : Prepaid or net 30 to government, universities, Fortune 500 companies, customers with established credit. Wire transfer in advance of shipment to overseas customers.
(Semiconductors eq.)
Address : 33 Great Oaks Blvd San Jose CA 95119
Web : View Website
Phone : 408/360-0380
Fax : 408/360-0390
 
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