Sputtered Films Shamrock - For Sale at Used-Line

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MRC Model 603 Load Lock Sputtering System
We can modify any aspect of our remanufactured process tools to meet individual customer specifications.
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Sputtered Films Shamrock


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Sputtered Films Shamrock

Price : Call

Seller : #8080 (ULRS)

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Sales Conditions :
Specified Equimpent will be sold as refurbished, calibrated, warranteed, and installed. Specific identified equipment will be sold as is where is with no warranty expressed or implied

Description : Sputtered Films Shamrock Sputtered Films Shamrock
6 sputtering sources, each rotatable. Can operate with either 6" target or 3" target mode.
-- Plus 7th module within the main chamber next to one of the sputtering targets ( ion milling source for GMR patterning)
-- 6" size substrate station, rotatable, and movable toward each of the other target positions for multilayer deposition if desired.
-- Main vacuum chamber (~30 -35" diameter) with loading module (load-lock) and transport module attached. The chamber is pumped with TMPH/U260 turbo pump placed on top.
-- Three Diaphragm vacuum pumps for clean low vac pumping (MD4, 3.8 m3/hr capacity).
-- Loading module with Pfeiffer TPH 180H U turbo pump
-- Transport module with Pfeiffer TPH 180H U turbo pump. Can be connected to another vacuum chamber system for sample transfer for analysis or additional processing if needed.
-- Also comes with a separate Balzer QME 200 Prisma with its own turbo pump (gas analyzer? + power supply)
-- 3 or 4 DC power supplies (MDX 1.5KW, from Advanced Energy Inc.) and other control units on two racks.

Seller Info :

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