Performance:
Secondary electron image resolution: 1.5 nm at 15 kVA
Magnification: 20x – 500KX
Electron Optics:
Electron Gun: Cold field emission source
Lens Type: Electromagnetic
Objective Aperture: 4 position externally selectable
Performance:
Objective aperture: 4 position externally selectable
Stigmator: Octopole electromagnetic
Scanning Coil: 2-stage electromagnetic
Sample Chamber:
Size: Type II
Airlock: Pre-pumped, max sample size: 150mm diameter
Stage Motion: 5-axis manual; X/Y: 100mm/50 mm, Z: 3-33 mm, T: -5 Deg - +60 Deg., R: 360 Deg continuous
Display System:
Image Display: Dual 12” Monitors
Scanning Mode: Normal, reduced area, line scan, photo scan, spot position, split screen
Scanning Speed: TV, 0.3, 2, 9, 25, 35, 100, 160 320 s/frame
Signal Processing: Real-time processing, auto-brightness and contrast control, dynamic stigmator, autofocus
Frame averaging, frame integration, contrast conversion
Vacuum System:
Full automatic operation with pneumatic valve control
Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in s