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FEI DualBeam 830



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Seller : #8257 (ULRS)
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Description : FEI DualBeam 830 3nm Schottky FEG, Pre Lens, NT 2GIS, EDX
Model: FEI 830 DualBeam #1
Type: DualBeam (SEM/FIB)
Year MFG: 1998
Warranty: Optional
Installation: Optional
Comments: Beam Data:
- Electron Column
* 3nm at 1kV, ~15mm WD
* Schottky field emission electron column
* 0.5-30kV

- Ion Column
* 7nm at 30kV, ~17mm WD,
* Ga LMIS, Magnum ion column
* 22nA current
* 10-30kV
Specimen Stage:
* 200mm 5 axis motorized, computerized eucentric tilt stage
* 200mm Load Lock for wafers and pieces
Detectors:
* E-Beam :In-lens Sec and Bse
* I-Beam: CDEM
Computer/Software * Pentium PC,
* Win NT OS
* FEI xp 2.25
Gas:
* Metal Deposition GIS
* Metal Etch GIS
Other components:
* TEAM video printer
* Leader Monitor
* Keithley Pico Amp Meter
* EDAX

Vacuum System:
* Turbo Chamber Vacuum, Dry rough pump
 
Seller Info :
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