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S SS MA25



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Seller : #3856 (ULRS)
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Description : S▄SS MA25 Double Side Mask Aligner The concept of the SUSS MA 25: ò Future-oriented development based on the most advanced technological know-how. ò Microprocessor controlled. ò Wafers up to 125 mm diameter or substrates up to 4 x 4 processed. (set up for 4 wafers) ò Compact design, clearly arranged construction, easy and reliable operation. Quick program entry. ò Automatic operation with interruption capability for manual alignment. ò Fully automatic operation for first mask exposure, using the high accuracy pre-alignment station. ò Easy wafer alignment by centrally located, one-hand, power manipulator (the joy-stick). ò High-precision, robust mechanics. The result of the SUSS MA 25 concept: Unsurpassed, highly economical production capabili- ties in the mass production of double side exposed wafers. The superior economy of operation, and high productivity, combined with the high positioning accuracy of multiple exposures, and between the two sides, are the result of the fast speed of operation and the unique reliability of the microprocessor controlled mechanical construction. Service ability: The SUSS MA 25 is particularly easy to service: ò Modular build. ò Easy accessibility of all functional groups. ò Easy replacement of complete assemblies. Technical Details Programmable microprocessor control In a novel, dialogue-type communication the microprocessor takes the operator through the work program of the machine, i.e., it calls the various parameters sequentially, up for data entry and places the data in the store after they have been displayed on the 16-digit, alpha-numeric LED display and confirmed by the operator by pressing the YES button. The control unit is contained in a tiltable 19 tray mounted on telesco
 
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