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CANON PLA 501FA



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Seller : #3856 (ULRS)
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Description : CANON PLA-501FA Proximity Mask Aligner The Canon PLA-501FA can handle wafers from 2 to 5 with a positive resist resolution of under 1.0 micron and 3.0 micron in proximity printing (proximity gap 20 micron) It features: Wafer autoloading / unloading Autoalignment set up for 5 Wafers (optional 4 ) incl. Gap Measuring Tool
 
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