Supercritical CO2ֲ dryer for MEMS devices, CPD 1100 series
Double walled stainless steel process chamber with motorized clamping mechanism and auto lid lifter
ֲ ֲ Max pressure rating 1600psig (110bar)
ֲ ֲ Max temperature 150F(65C)
ֲ ֲ Process single wafers up to 150 mm diameter and 5.0 mm high
ultraclean CO2 delivery system, point of use (<003u) particle filter
recirculating heater bath
solvent separator and water heaterֲ
inlet valve system consists of high purity valves and electropolishedֲ orbital welded stainless tubing
PLC controllerֲ stores up to 10 process recipes
Facility requirements:
compressed air: clean, dry, and filtered
water: min 1gpm at 15-45psi
Liquid CO2 SFC or SFE grade with He head of 2000psi and educator tubeֲ ֲ
Supercritical CO2ֲ dryer for MEMS devices, CPD 1100 series
Double walled stainless steel process chamber with motorized clamping mechanism and auto lid lifter
ֲ ֲ Max pressure rating 1600psig (110bar)
ֲ ֲ Max temperature 150F(65C)
ֲ ֲ Process single wafers up to 150 mm diameter and 5.0 mm high
ultraclean CO2 delivery system, point of use (<003u) particle filter
recirculating heater bath
solvent separator and water heaterֲ
inlet valve system consists of high purity valves and electropolishedֲ orbital welded stainless tubing
PLC controllerֲ stores up to 10 process recipes
Facility requirements:
compressed air: clean, dry, and filtered
water: min 1gpm at 15-45psi
Liquid CO2 SFC or SFE grade with He head of 2000psi and educator tubeֲ ֲ