HITACHI S-3000

• Secondary electron image resolution : 3.0nm in high vacuum mode, 15nm in high vacuum mode powered by acceleration voltage in 3kV
• Backscattered electron image resolution : 4.0nm in low vacuum mode
• Magnification : 15 to 300000x, 5 to 300000x (low mag. mode, 5x, WD=35mm, lower than 2kv as acceleration voltage)
• Acceleration voltage : 0.3 to 30kV
• Image sift : lower than ±20um(WD=15mn)
• Objective lens :  super conical lens
• Filament : cartridge(tungsten hairpin type filament)
• Sample adjusting screw : X and Y, 2 axes motor drive unit, 0 to 0.8mm for X, 0 to 40mm for Y, 10 to 35mm for Z(WD)10 to 35mm, 0 to 360 degrees to revolve sample, -20 to 90 degree to tilt sample

Accessories : low vacuum mode, Backscattered- electron detector, PC, SEM Date Manager, 2 axes for X and Y motor drive unit, W-5030 x 1 as a cooling water circulation apparatus, GLD-136B x 2 as oil-sealed rotary pumps, HITACHI 0.2OP-5S x 1 as a compressor, extra-filaments, various sample tables and so on