s for coating up to 200mm diameter substrates (3240)
This turbo pumped thermal evaporator was purchased and never put in operation. It is in "as new" condition with 0 hours on the turbo pump.
Front opening stainless chamber with 12"x16" opening
Dual filament holders with (2) 2KVA transformers
Inficon XTC/2 deposition controller with quartz crystal holder
8" rotating substrate holder with shutter
Alcatel 2 stage roughing pump and Leybold 360 oil bearing turbo pump with NT360 power supply
AC Glow discharge for preclean
LN2 trap with funnel
Removable shield inside vacuum chamber
Neslab CFT-75 chiller, 208-240vac
Systems in "as new" condition.
Test results: Denton DV502A at EquipX facility
Base pressure is 1x10-6 with no LN2.
Power is 230/115V 4 wire 30A. 2 legs of 115V, 1N, 1G. It has a couple 115V internal components so a neutral is required. (230 = 208 to 240V.)
Utilities are 80 psi air 1/4 SWG for valve operation and separate low pressure 1/4 SWG for vent.
Power to evap terminals are 2, 2 kVA transformers, one for each side. Power is controlled either from the XTC/2 controller or manually from the front panel.
This turbo pumped thermal evaporator was purchased and never put in operation. It is in "as new" condition with 0 hours on the turbo pump.
Front opening stainless chamber with 12"x16" opening
Dual filament holders with (2) 2KVA transformers
Inficon XTC/2 deposition controller with quartz crystal holder
8" rotating substrate holder with shutter
Alcatel 2 stage roughing pump and Leybold 360 oil bearing turbo pump with NT360 power supply
AC Glow discharge for preclean
LN2 trap with funnel
Removable shield inside vacuum chamber
Neslab CFT-75 chiller, 208-240vac
Systems in "as new" condition.
Test results: Denton DV502A at EquipX facility
Base pressure is 1x10-6 with no LN2.
Power is 230/115V 4 wire 30A. 2 legs of 115V, 1N, 1G. It has a couple 115V internal components so a neutral is required. (230 = 208 to 240V.)
Utilities are 80 psi air 1/4 SWG for valve operation and separate low pressure 1/4 SWG for vent.
Power to evap terminals are 2, 2 kVA transformers, one for each side. Power is controlled either from the XTC/2 controller or manually from the front panel.