Technics Tepla 300

This system sold we do have an autpo loader system for 12,500 !  inquire photos coning soon.

Used Tepla 300E Microwave Plasma Etcher

Microwave Plasma Etcher Applications Photoresist stripping Mask Etching Surface Cleaning Etching of Glass and ceramics Etching of SiO2, Si3N4, Si Removal of Polyimid and passivation layer Process chamber quartz w/ KAPTON cover Dimensions 9.5 inches inner diameter 380 mm depth (3) separate gas channels controlled by MFCs (O2, N2, Phoshorous) Maximum flow rate per channel 500 sccm Working pressure 0.5 1.5 mbar 250V, 15A Leybold D25BC pump