SAMCO PC-1000

Name: SAMCO PC-1000
Brand: SAMCO
Price: 20000 USD
Availability: OutOfStock

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Equipment Location: Japan

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Description of SAMCO PC-1000

Categories: Semi & SMT/PCB, Semiconductor Cleaners

Manufacturer: Samco

Condition: Used

Seller: Tanaka Corporation

#07740 SAMCO Plasma Cleaner PC-1000

Model year : 2006
Dimension of cleaning room : W459 x D615 x H459mm (a SUS304)
Electrode : aluminum W405 x D410mm attached 2 connecting plugs for ground electrode (anode electrode), aluminum W350 x D425mm attached 2 connecting plugs for powered electrode
Power supply for high frequency : 13.56MHz, crystal oscillation, solid-state, MAX. 1kW
Matching circuit : full-automatic (manually operatable)
Gas feed system : 2 systems for massflow controllers
Gas feed valve : stopping valve of electromagnetic drive type
Exhaust system : series type of rotary pump
Exhausting valve : air-drive type
Frame : attached to storage RF power supply unit
External dimension : W1000 x D1067 x H1345mm for main body, included frame and valves on back side, not included tower light W450 x D787 x H689mm for pump
Power supply : 3φ AC200V 50/60Hz 30A

Used-Line Dealer since : 2001

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