Headway PWM-32-PS-CB15 spin coater,
PS motor: up to 10,000 RPM,
CB15 bowl: 15"ID with 12.75" opening for maximum 12" diameter substrate
includes cabinetֲ with spin coater flush mounted
includes 5" vacuum chuck
PWM32 microprocessor controller with up to 9 steps/recipe,
Model 26G vacuum ballast module
User defined parameters include: RPM, ramp, time, various I/O for of accessory control (dispensers, auto lid, exhaust, etc). ֲ
HDP98 photoresistֲ dispense pump
Power requirements: 110/220vac 50/60hz
- PWM32 Microprocessor Sequence Controller
- Up to 9 steps in one recipe
- Memory for up to 10 user-designed recipes
- User-set in each step: rpm, ramp (accel/decel), time, various I/O for accessory control (dispensers, exhaust control, lid/doors, etc.
- Speed can be manually adjusted while a recipe is running
- Operator can manually turn on the vacuum to the chuck, overriding AUTO control
- LCD interface for user input prompting and process display
- RS485 port for future communication and add-on equipment use
- An optional accessory stand is available for the controller. It permits the controller to sit on a tabletop surface, inclined upward toward the operator. It may also alternately be used to suspend the controller underneath a tabletop, inclined upward toward the operator.
- The basic controller can control simple dispensers at minimal cost for additional dispenser hardware. Controller I/O allows output of 2 fluids.
- The PWM 32 controller can directly replace many older SCR type controllers (EC101 and PM101) for improved PWM performance, as well as the other new features. A trade-in credit will be given on applicable EC/PM101 spinners or controllers. Typically, dispensers used on EC/PM101 spinners will not work with the PWM32 control. It may be possible at the factory to adapt such dispensers, or to use applicable parts in building a compatible dispenser.
See PDF link below for full specifications
Headway PWM-32-PS-CB15 spin coater,
PS motor: up to 10,000 RPM,
CB15 bowl: 15"ID with 12.75" opening for maximum 12" diameter substrate
includes cabinetֲ with spin coater flush mounted
includes 5" vacuum chuck
PWM32 microprocessor controller with up to 9 steps/recipe,
Model 26G vacuum ballast module
User defined parameters include: RPM, ramp, time, various I/O for of accessory control (dispensers, auto lid, exhaust, etc). ֲ
HDP98 photoresistֲ dispense pump
Power requirements: 110/220vac 50/60hz
- PWM32 Microprocessor Sequence Controller
- Up to 9 steps in one recipe
- Memory for up to 10 user-designed recipes
- User-set in each step: rpm, ramp (accel/decel), time, various I/O for accessory control (dispensers, exhaust control, lid/doors, etc.
- Speed can be manually adjusted while a recipe is running
- Operator can manually turn on the vacuum to the chuck, overriding AUTO control
- LCD interface for user input prompting and process display
- RS485 port for future communication and add-on equipment use
- An optional accessory stand is available for the controller. It permits the controller to sit on a tabletop surface, inclined upward toward the operator. It may also alternately be used to suspend the controller underneath a tabletop, inclined upward toward the operator.
- The basic controller can control simple dispensers at minimal cost for additional dispenser hardware. Controller I/O allows output of 2 fluids.
- The PWM 32 controller can directly replace many older SCR type controllers (EC101 and PM101) for improved PWM performance, as well as the other new features. A trade-in credit will be given on applicable EC/PM101 spinners or controllers. Typically, dispensers used on EC/PM101 spinners will not work with the PWM32 control. It may be possible at the factory to adapt such dispensers, or to use applicable parts in building a compatible dispenser.
See PDF link below for full specifications