SPTS CPX MULTIPLEX DSIE

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Equipment Location: Ireland

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Description of SPTS CPX MULTIPLEX DSIE

Categories: Semi & SMT/PCB, Etchers

Condition: Used

Seller: Tara Semiconductor Technology Ltd

SPTS CPX MULTIPLEX

Manufacturer: SPTS (STS)

Model: CPX (Multiplex) Multi-Chamber Etch System

Description: Deep Silicon Etch (DSIE) + XeF2 Etcher

Serial Number: C050

Date of Manufacture: 1998

Cfg Wafer Size: 150mm

Max Wafer Size: 200mm (with process kit change)

Configuration:

– Main Body (110” x 63”) with vacuum load locks and transfer chamber

– x1 ICP Deep Silicon Etch Chamber

– x1 XeF2 (Xenon Difluoride) Polysilicon Release Etch Chamber

– x1 Roughing Pump

– x2 Load Lock Pumps

– x2 Chamber Pumps

– Thermco Chiller

BROOKS MX600 with 2 VCE’s

STS PRO software connected via DeviceNet.

Computer runs Windows

Used-Line Dealer since : 2016

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