MICRONICS JAPAN MP-10

• Chuck Stage : Air bearing stage
• Stage Movement : X250mm, Y300mm
• Substage Movement : X15mm, Y15mm
• Chuck Size : 8 inch(φ200mm)
• Vacuum adsorption method
• Z Movement : 0~3.5mm+40mm
• θ Adjustment : 180 deg 
• Prober Dimension : W560 x D650 x H580mm *Including a microscope

Item Configuration

*Air compressor for vibration isolation table is not attached.

• Prober
• Microscope X-Y scanner
• Guide rail 
• Stereo microscope SZ6045TR(Trinocular/made by Olympus)
• Fiber ring light equipment for a stereo microscope(made by Olympus) 
• Ring plate
• 116ME-W workstation(Table)
• C-51A shield box
• TA-56 vibration isolation table
• Small vacuum pump  
• Small air pump