Measument head/controller : VR-3200/VR-3000
Obsevation mode : 12,25,38,50x in wide-field , 40,80,120,160x in high magnification on type 15 monitor
Measurable height : 10mm±5mm in wide- field, 1mm±0.5mm in hight magnification
Measurement accuracy : ±3μm for height, ±5μm for wide-field and width, ±2μm for high magnification and width
Stage stroke : X184mmxY88mm in electromotion with Φ90mm revolving table
Z axsis stroke : 90mm in electromotion
Traveling range : 75mm
Image sensor : type 1 4m pixels monochrome CMOS
Lenses for flood light/light reception : double tele centrickｘ2/double tele centrick
Illumination : LED ring（RGB、for observation）, white LED（for measurement）
Picture size : 1024x768pix、2048x1536pix
Power supply : AC100～240V±10%、50/60Hz、150VA
Weight : approx. 28kg（head and 100mm height space, not included), approx. 3.8kg（controller）
Installed softwares : VR-H2V as observing apprication, VR-H2A as analyzing apprication, VR-H2J as connecting module, VR-H2P as conparative measuremant module
100mm height space : OP-87708 installed
Measurable height for specimen : 170mm with VR-S200 table, 188m without the table