EVG

150 Automated Coater / Developer Processing Sys

Vintage:

2010

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by our company.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.

EVG 150 AUTOMATED COATER / DEVELOPER PROCESSING SYSTEM consisting of:

- Model: EVG150
- Automated Resist Processing Station
- 3 Spin Modules: Bake, Chill & Vapor Prime
- Send/Receive Cassette Station with Ergo Load Mounts
- Cassette to Cassette Handling
- Currently Configured for 4"/100mm & 6"/150mm Wafers
- Up to 8"/200mm Wafer Capable
- Resist and Solvent Level Sensing System with Software Display for Resist Filling Level

- Station 1: Spin Coating Station
•    PTFE Spin Chamber
•    Programmable Drive Unit for up to 10,000 RPM
•    Programmable Dispense Arm for Centre, Edge, and Area Dispense
•    For use with 4 Different Resist Lines
•    Drain Tank with Filling Level Sensor underneath Coat Module
•    Bowl Wash Cover included
•    Spinner Chuck: request at time of order
•    2x Standard Resist Pump Dispense Systems for Dispense Coating
•    1x IDI Model 600 High Viscosity Pump for Spin Coating
•    1x Syringe Dispense System for Spin Coating
•    1x Top Side Edge Bead Removal (EBR) System for Spin Coating
•    1x Backside Rinse (BSR) for Spin Coating


- Station 2: Spray Coating Station
•    PTFE Coating Chamber
•    Programmable Rotational Speed of Substrate
•    Spray Unit consisting of Atomizer and Spray Nozzle for Independent Opeartion
•    Integrated Solvent Lines for Spray Unit Wash
•    Drain Tank with Filling Level Sensor underneath Coat Module
•    Bowl Wash Cover Included
•    Spinner Chuck: request at time of order
•    1x Syringe Dispense System for Spray Coating
•    1x Exhaust Flow Controller Box
•    1x Top Side Edge Bead Removal (EBR) System for Spray Coating
•    1x Backside Rinse (BSR) for Spray Coating
•    1x 5 Gallon Bowl Wash Tank
•    2x Liquid Primer Dispense System
•    1x Pressurized Tank for Primer


- Station 3: Developer Module
•    PTFE Spin Chamber
•    Programmable Drive Unit for up to 4,000 RPM
•    1x Dispense Nozzle for Spray Develop, Puddle Develop, DI Water Stream Line
•    1x Additional Develop Dispense System
•    1x Nitrogen Dry Nozzle
•    1x Backside Rinse
•    1x Bypass DI Water System
•    Spinner Chuck: request at time of order

- 2x Bake Modules (up to +150C)
- 2x High Temperature Bake Modules (up to +250C)
- 1x High Temperature Bake Module (up to +350C)
- 1x Bake Module for HMDS Vapor Priming (up to +150C)
- 2x Chill Modules, CDA Cooled
-1x Chemical Cabinet for up to 8 Chemicals
- Microsoft Windows based User Interface
- System PC, Keyboard, Cables
- Operations Manual for EVG150
- Manufactured in 2010
Configuration:

8"/200mm, Spin Station, Coating Station, Developer Station, 6 Bake & 2 Chill Modules