First Nano ET6000

This furnace has little usage (maybe like 2 weeks if that...like a new furnace. PRICED TO SELL FAST!!! Must see) and is set up to do 2", 3" and possible 4" wafers. It was for R&D purposes only and so has low hours.The EasyTube® 6000 Series Multi-Tube Horizontal Furnace Systems can be configured for batch processing of multiple wafers with up to four (4) separately configured reactors in the same system.
ET6000 systems are used worldwide in complementary metal-oxide-semiconductor (CMOS) and micro-electro-mechanical systems (MEMS) fabrication plants to perform steps in the process workflow. Examples include oxidation, diffusion, silicon deposition, oxide deposition, nitride deposition, boron phosphate silicate glass, etc.
The system is designed to meet today’s safety standards for handling pyrophoric, corrosive, flammable, and toxic gases such as hydrogen, silane, germane, diborane, hydrogen chloride, and metal organic precursors. The system has application configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.
Cantilevered Loading System
The EasyTube® 6000 Series utilizes a cantilevered substrate loading mechanism and has a horizontal HEPA filtered laminar flow hood to minimize particle contamination during loading.
 CVDWinPrC™ system control software for real time process control, data logging, and recipe editing
 Mounting choices: left hand, right hand, bulkhead, ballroom
 Up to four (4) process tubes
 Cantilevered automatic substrate loading/unloading system
 Can do Wafer sizes up to 200mm (3 stack furnace), Wafer sizes up to 150 mm (4 stack furnace)
 Up to 25 to 50 wafers per load (process dependent). Larger loads are available on request
 Proprietary real-time cascade process temperature control
 Four (4) mass flow controlled UHP gas lines per process tube
 Atmospheric and low pressure process configurations available
 User settable warnings and alarms
 Application configured safety systems
 Comprehensive software and hardware safety interlocks
 Semi - S2/S8 and CE compliant


Condition: Excellent Like New
Year: 2010